SMC Slit Valve
Product Code: XGT223-46236-1F...
Available to Order
tech sheet
Details
Application
Partition valve between load lock chamber and transfer chamber and between transfer chamber and process chamber in semiconductor manufacturing equipment
Series
XGT
Model
XGT223-46236-1F
Accessories
Gasket with wiper for bellows protection Rubber cushions for impact absorption End lock mechanism
Manufacturer
SMC
Valve Material
FKM (Gate O-ring Material)
Brand
SMC
Specification
SMC Slit Valve, SMC
Additional Variants
Product Name
Product Code
Actuation
Material
List Price
Cassette Type Standard
Gate O-ring FKM
Available to Order