SMC High Vacuum Angle Valve
Product Code: XLA-16-2M9//...
Available to Order
tech sheet
Details
Seal Material
FKM
Body Material
Aluminium
Length mm
59
Manufacturer
SMC
Actuation
Normally Closed
Width mm
108
Series
XL2
Height mm
38
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Application
Valve Material
Width mm
Seal Type
Feature
Length mm
Ambient Temperature
Operation
Actuator Working Temperature
Angle
Actuation
Flange Specification
List Price
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Available to Order
48
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
121
Bellows seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Normally Closed
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Available to Order
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High Vacuum
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5 to 60°C
Normally Closed Bellows Seal
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Available to Order
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High Vacuum
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5 to 60°C
Normally Closed
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Available to Order
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Available to Order
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185
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110
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Available to Order
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121
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77
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Available to Order
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High Vacuum
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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High vacuum applications
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Bellows seal
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Normally Closed
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Single acting
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Available to Order
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High vacuum applications requiring minimal contamination and corrosion resistance
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Bellows seal
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Normally Closed
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Angle Valve
Single acting
KF NW
Available to Order
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Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Bellows seal
–
–
–
–
–
–
Normally Closed
–
Available to Order
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High Vacuum
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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5 to 60°C
Normally Closed Bellows Seal
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed, Single Acting, Bellows Seal
5 to 60°C
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Available to Order