SMC High Vacuum Angle Valve
Product Code: XLA-63-2M9//...
Available to Order
tech sheet
Details
Seal Material
FKM
Body Material
Aluminium
Manufacturer
SMC
Actuator Working Temperature
5 to 60°C
Operation
Normally Closed, Single Acting, Bellows Seal
Application
High vacuum angle valve for semiconductor and vacuum applications
Series
XL2
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Valve Material
Width mm
Seal Type
Feature
Actuation
Length mm
Ambient Temperature
Operation
Application
Angle
Flange Specification
List Price
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Available to Order
48
Aluminium
121
Bellows seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
74
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Available to Order
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Available to Order
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5 to 60°C
Normally Closed Bellows Seal
High Vacuum
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Available to Order
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High Vacuum
Normally Closed
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Available to Order
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Available to Order
79
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185
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110
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Available to Order
38
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108
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Normally Closed
59
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Available to Order
48
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121
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77
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Available to Order
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
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Normally Closed Bellows Seal
High Vacuum
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Available to Order
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Available to Order
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Available to Order
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Bellows seal
Single acting
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Normally Closed
High vacuum applications
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Available to Order
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Bellows seal
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
Angle Valve
KF NW
Available to Order
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Available to Order
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Available to Order
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Bellows seal
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Normally Closed
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High vacuum angle valve for semiconductor and vacuum applications
–
–
Available to Order
–
–
–
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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5 to 60°C
Normally Closed Bellows Seal
High Vacuum
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Available to Order
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Normally Closed Bellows Seal
High Vacuum Angle Valve
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Available to Order