Details
Width mm
121
Seal Material
FKM
Length mm
74
Body Material
Aluminium
Valve Material
Aluminium
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Manufacturer
SMC
Height mm
48
Actuation
Normally Closed
Application
High vacuum angle valve for semiconductor and vacuum applications
Series
XL2
Brand
SMC
Seal Type
Bellows seal
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Ambient Temperature
Operation
Application
Actuator Working Temperature
Angle
Height mm
Width mm
Length mm
Feature
Actuation
Flange Specification
List Price
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Available to Order
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Available to Order
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–
–
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–
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Available to Order
5 to 60°C
Normally Closed Bellows Seal
High Vacuum
–
–
–
–
–
–
–
–
Available to Order
–
–
High Vacuum
5 to 60°C
Normally Closed
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Available to Order
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Available to Order
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79
185
110
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Available to Order
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–
38
108
59
–
Normally Closed
–
Available to Order
–
–
–
–
–
48
121
77
–
–
–
Available to Order
–
Normally Closed Bellows Seal
High Vacuum
–
–
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
Available to Order
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–
–
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Available to Order
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Available to Order
–
Normally Closed
High vacuum applications
–
–
–
–
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Bellows seal
Single acting
–
Available to Order
–
Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
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Angle Valve
–
–
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
KF NW
Available to Order
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Available to Order
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–
–
–
–
–
Available to Order
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
–
–
Normally Closed
–
Available to Order
5 to 60°C
Normally Closed Bellows Seal
High Vacuum
–
–
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
Available to Order
–
Normally Closed Bellows Seal
High Vacuum Angle Valve
–
–
–
–
–
–
–
–
Available to Order
–
Normally Closed, Single Acting, Bellows Seal
High vacuum angle valve for semiconductor and vacuum applications
5 to 60°C
–
–
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Available to Order


