SMC High Vacuum Angle Valve
Product Code: XLA-16G-2M9//...
Available to Order
tech sheet
Details
Seal Material
FKM
Body Material
Aluminium
Valve Material
Aluminium
Angle
Angle Valve
Actuation
Single acting
Manufacturer
SMC
Width mm
108
Length mm
60
Application
High vacuum angle valve for semiconductor and vacuum applications
Series
XL2
Feature
Bellows seal
Height mm
38
Operation
Normally Closed
Ambient Temperature
5 to 60°C
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Width mm
Seal Type
Feature
Actuation
Length mm
Operation
Application
Actuator Working Temperature
Angle
Flange Specification
List Price
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Available to Order
48
121
Bellows seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
74
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Available to Order
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Available to Order
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Normally Closed Bellows Seal
High Vacuum
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Available to Order
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High Vacuum
5 to 60°C
Normally Closed
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Available to Order
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Available to Order
79
185
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110
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Available to Order
38
108
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Normally Closed
59
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Available to Order
48
121
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77
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Available to Order
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
Normally Closed Bellows Seal
High Vacuum
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–
Available to Order
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Available to Order
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Available to Order
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–
Bellows seal
Single acting
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Normally Closed
High vacuum applications
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–
–
Available to Order
–
–
Bellows seal
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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Normally Closed
High vacuum applications requiring minimal contamination and corrosion resistance
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Angle Valve
KF NW
Available to Order
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Available to Order
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Available to Order
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Bellows seal
–
Normally Closed
–
–
High vacuum angle valve for semiconductor and vacuum applications
–
–
–
Available to Order
–
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
Normally Closed Bellows Seal
High Vacuum
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Available to Order
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Normally Closed Bellows Seal
High Vacuum Angle Valve
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Available to Order