Details
Width mm
121
Seal Material
FKM
Length mm
74
Body Material
Aluminium
Manufacturer
SMC
Height mm
48
Series
XL2
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Application
Valve Material
Seal Type
Feature
Actuation
Ambient Temperature
Operation
Actuator Working Temperature
Angle
Height mm
Width mm
Length mm
Flange Specification
List Price
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Available to Order
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
Bellows seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
–
–
–
–
48
121
74
–
Available to Order
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–
Available to Order
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–
–
–
Available to Order
High Vacuum
–
–
–
–
5 to 60°C
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
High Vacuum
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–
–
–
–
–
5 to 60°C
Normally Closed
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–
Available to Order
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Available to Order
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79
185
110
–
Available to Order
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–
–
Normally Closed
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–
–
38
108
59
–
Available to Order
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–
–
–
–
–
–
–
–
48
121
77
–
Available to Order
High Vacuum
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
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Available to Order
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–
–
Available to Order
High vacuum applications
–
–
Bellows seal
Single acting
–
Normally Closed
–
–
–
–
–
–
Available to Order
High vacuum applications requiring minimal contamination and corrosion resistance
–
Bellows seal
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
–
Normally Closed
–
Angle Valve
–
–
–
KF NW
Available to Order
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–
–
Available to Order
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–
–
–
–
–
–
–
–
–
–
Available to Order
High vacuum angle valve for semiconductor and vacuum applications
–
Bellows seal
–
Normally Closed
–
–
–
–
–
–
–
–
Available to Order
High Vacuum
–
–
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
5 to 60°C
Normally Closed Bellows Seal
–
–
–
–
–
–
Available to Order
High Vacuum Angle Valve
–
–
–
–
–
Normally Closed Bellows Seal
–
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–
–
Available to Order


