SMC High Vacuum Angle Valve
Product Code: XLA-40-2-XF1A...
Available to Order
tech sheet
Details
Operation
Normally Closed Bellows Seal
Seal Material
FKM
Body Material
Aluminium
Feature
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Manufacturer
SMC
Series
XL2
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Application
Valve Material
Width mm
Seal Type
Actuation
Length mm
Ambient Temperature
Actuator Working Temperature
Angle
Feature
Operation
Flange Specification
List Price
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Available to Order
48
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
121
Bellows seal
Normally Closed
74
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Available to Order
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High Vacuum
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5 to 60°C
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Normally Closed Bellows Seal
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Available to Order
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High Vacuum
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5 to 60°C
Normally Closed
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Available to Order
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Available to Order
79
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185
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110
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Available to Order
38
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108
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Normally Closed
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Available to Order
48
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121
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77
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Available to Order
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High Vacuum
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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High vacuum applications
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Single acting
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Bellows seal
Normally Closed
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Available to Order
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High vacuum applications requiring minimal contamination and corrosion resistance
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Bellows seal
Single acting
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Angle Valve
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
KF NW
Available to Order
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Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Bellows seal
Normally Closed
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–
–
–
–
–
Available to Order
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High Vacuum
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5 to 60°C
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed Bellows Seal
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order