SMC High Vacuum Angle Valve
Product Code: XLA-40-2M9//...
Available to Order
tech sheet
Details
Seal Material
FKM
Body Material
Aluminium
Height mm
66
Actuation
Single acting
Width mm
171
Length mm
98
Manufacturer
SMC
Series
XL2
Feature
High corrosion resistance to fluorine gas Minimal outgassing Minimal contamination from heavy metals Uniform baking temperature Lightweight Compact
Operation
Normally Closed
Brand
SMC
Seal Type
Bellows seal
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Application
Valve Material
Width mm
Feature
Actuation
Length mm
Ambient Temperature
Operation
Actuator Working Temperature
Angle
Flange Specification
List Price
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Available to Order
48
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
121
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
74
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Available to Order
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Available to Order
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Available to Order
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High Vacuum
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5 to 60°C
Normally Closed Bellows Seal
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Available to Order
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High Vacuum
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5 to 60°C
Normally Closed
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Available to Order
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Available to Order
79
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185
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110
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Available to Order
38
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108
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Normally Closed
59
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Available to Order
48
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121
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77
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Available to Order
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High Vacuum
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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High vacuum applications
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Bellows seal
Single acting
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Normally Closed
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Available to Order
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High vacuum applications requiring minimal contamination and corrosion resistance
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Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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Normally Closed
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Angle Valve
KF NW
Available to Order
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Available to Order
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Available to Order
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High vacuum angle valve for semiconductor and vacuum applications
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Normally Closed
–
–
–
–
–
–
Available to Order
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High Vacuum
–
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
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5 to 60°C
Normally Closed Bellows Seal
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order