Details
Manufacturer
SMC
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Application
Body Material
Valve Material
Width mm
Seal Material
Seal Type
Series
Feature
Actuation
Length mm
Ambient Temperature
Operation
Actuator Working Temperature
Angle
Flange Specification
List Price
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
48
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
Aluminium
121
FKM
Bellows seal
XL2
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
74
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
High Vacuum
Aluminium
–
–
FKM
–
XL2
–
–
–
5 to 60°C
Normally Closed Bellows Seal
–
–
–
Available to Order
–
High Vacuum
Aluminium
–
–
FKM
–
XL2
–
–
–
–
–
5 to 60°C
Normally Closed
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
79
–
Aluminium
–
185
FKM
–
XL2
–
–
110
–
–
–
–
–
Available to Order
38
–
Aluminium
–
108
FKM
–
XL2
–
Normally Closed
59
–
–
–
–
–
Available to Order
48
–
Aluminium
–
121
FKM
–
XL2
–
–
77
–
–
–
–
–
Available to Order
–
High Vacuum
Aluminium
–
–
FKM
–
XL2
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
–
Normally Closed Bellows Seal
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
Aluminium
–
–
FKM
–
XL2
–
–
–
–
–
–
–
–
Available to Order
–
High vacuum applications
Aluminium
–
–
FKM
–
XL2
Bellows seal
Single acting
–
–
Normally Closed
–
–
–
Available to Order
–
High vacuum applications requiring minimal contamination and corrosion resistance
Aluminium
–
–
FKM
Bellows seal
XL2
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
–
–
Normally Closed
–
Angle Valve
KF NW
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
–
Available to Order
–
High vacuum angle valve for semiconductor and vacuum applications
Aluminium
–
–
FKM
Bellows seal
XL2
–
Normally Closed
–
–
–
–
–
–
Available to Order
–
High Vacuum
Aluminium
–
–
FKM
–
XL2
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
5 to 60°C
Normally Closed Bellows Seal
–
–
–
Available to Order
–
High Vacuum Angle Valve
Aluminium
–
–
FKM
–
XL2
–
–
–
–
Normally Closed Bellows Seal
–
–
–
Available to Order


