SMC High Vacuum Angle Valve
Product Code: XLA-63G-2M9//...
Available to Order
tech sheet
Details
Operation
Normally Closed Bellows Seal
Seal Material
FKM
Body Material
Aluminium
Manufacturer
SMC
Application
High vacuum angle valve for semiconductor and vacuum applications
Series
XL2
Brand
SMC
Specification
SMC High Vacuum Angle Valve, SMC
Additional Variants
Product Name
Product Code
Height mm
Valve Material
Width mm
Seal Type
Feature
Actuation
Length mm
Ambient Temperature
Application
Actuator Working Temperature
Angle
Operation
Flange Specification
List Price
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Available to Order
48
Aluminium
121
Bellows seal
Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Normally Closed
74
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High vacuum angle valve for semiconductor and vacuum applications
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Available to Order
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Available to Order
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Available to Order
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5 to 60°C
High Vacuum
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Normally Closed Bellows Seal
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Available to Order
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High Vacuum
5 to 60°C
Normally Closed
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Available to Order
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Available to Order
79
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185
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110
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Available to Order
38
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108
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Normally Closed
59
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Available to Order
48
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121
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77
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Available to Order
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
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High Vacuum
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Normally Closed Bellows Seal
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Available to Order
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Available to Order
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Available to Order
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Bellows seal
Single acting
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High vacuum applications
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Normally Closed
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Available to Order
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Bellows seal
Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
Single acting
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High vacuum applications requiring minimal contamination and corrosion resistance
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Angle Valve
Normally Closed
KF NW
Available to Order
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Available to Order
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Available to Order
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Bellows seal
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Normally Closed
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High vacuum angle valve for semiconductor and vacuum applications
–
–
–
–
Available to Order
–
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–
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Single acting Bellows seal Aluminium bodied Uniform baking temperature Minimal outgassing High corrosion resistance to fluorine gas Lightweight Compact Minimal contamination from heavy metals
–
–
5 to 60°C
High Vacuum
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Normally Closed Bellows Seal
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Available to Order
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High Vacuum Angle Valve
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Normally Closed Bellows Seal
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Available to Order